| Vibration Identification of Folded-MEMS Comb Drive Resonators | |
| Han, Jianxin; Li, Lei; Jin, Gang; Feng, Jingjing; Li, Baizhou; Jia, Haili; Ma, Wenkui | |
| 刊名 | MICROMACHINES
 |
| 2018 | |
| 卷号 | 9期号:8 |
| 关键词 | MEMS nonlinear vibration comb drive primary resonance |
| DOI | 10.3390/mi9080381 |
| URL标识 | 查看原文 |
| 公开日期 | [db:dc_date_available] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4573948 |
| 专题 | 山东大学 |
| 作者单位 | Tianjin Univ Technol & Educ, Sch Mech Engn, Tianjin Key Lab High Speed Cutting & Precis Machi, Tian |
| 推荐引用方式 GB/T 7714 | Han, Jianxin,Li, Lei,Jin, Gang,et al. Vibration Identification of Folded-MEMS Comb Drive Resonators[J]. MICROMACHINES,2018,9(8). |
| APA | Han, Jianxin.,Li, Lei.,Jin, Gang.,Feng, Jingjing.,Li, Baizhou.,...&Ma, Wenkui.(2018).Vibration Identification of Folded-MEMS Comb Drive Resonators.MICROMACHINES,9(8). |
| MLA | Han, Jianxin,et al."Vibration Identification of Folded-MEMS Comb Drive Resonators".MICROMACHINES 9.8(2018). |
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