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	Influence of Template Modulus of Elasticity on Polymer Filling, Deformation and Stress Distribution
	Wang, Qing; Zhang, Yanju; Zheng, Xu; Ma, Lijun; Zhang, Rui
刊名	JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
	2018
卷号	31期号:1页码:19-26
关键词	Nanoimprint lithography Modulus of elasticity Template deformation Stress concentration Simulation
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4564328
专题	山东大学
作者单位	1.Shandong Univ Sci & Technol, Sch Mat Sci & Engn, 579 Qianwangang Rd, Qingdao 266590, Shandong, Peoples R China. 2.[Wang, Qing 3.Zhang, Ya
推荐引用方式 GB/T 7714	Wang, Qing,Zhang, Yanju,Zheng, Xu,et al. Influence of Template Modulus of Elasticity on Polymer Filling, Deformation and Stress Distribution[J]. JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY,2018,31(1):19-26.
APA	Wang, Qing,Zhang, Yanju,Zheng, Xu,Ma, Lijun,&Zhang, Rui.(2018).Influence of Template Modulus of Elasticity on Polymer Filling, Deformation and Stress Distribution.JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY,31(1),19-26.
MLA	Wang, Qing,et al."Influence of Template Modulus of Elasticity on Polymer Filling, Deformation and Stress Distribution".JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 31.1(2018):19-26.

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