QQ客服 官方微博 反馈留言

	Influence of power frequency on the performance of SiC thin films deposited by pulsed DC magnetron sputtering
	Sun, Hui; Lin, Song-Sheng; Wang, Kun-Lun; Shi, Qian; Song, Shu-Mei; Xin, Yan-Qing; Yang, Tian-Lin; Zheng, Xiao-Yan; Wang, Wan-Xia; Yue, Zhen-Ming
刊名	Journal of Adhesion Science and Technology
	2019
卷号	33期号:20页码:2181-2190
DOI	10.1080/01694243.2019.1639885
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4559819
专题	山东大学
作者单位	School of Space Science and Physics, Shandong University at
推荐引用方式 GB/T 7714	Sun, Hui,Lin, Song-Sheng,Wang, Kun-Lun,et al. Influence of power frequency on the performance of SiC thin films deposited by pulsed DC magnetron sputtering[J]. Journal of Adhesion Science and Technology,2019,33(20):2181-2190.
APA	Sun, Hui.,Lin, Song-Sheng.,Wang, Kun-Lun.,Shi, Qian.,Song, Shu-Mei.,...&Yue, Zhen-Ming.(2019).Influence of power frequency on the performance of SiC thin films deposited by pulsed DC magnetron sputtering.Journal of Adhesion Science and Technology,33(20),2181-2190.
MLA	Sun, Hui,et al."Influence of power frequency on the performance of SiC thin films deposited by pulsed DC magnetron sputtering".Journal of Adhesion Science and Technology 33.20(2019):2181-2190.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。