| Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting | |
| Zheng, Xu; Wang, Qing; Du, Wenquan | |
| 刊名 | MICROMACHINES
 |
| 2019 | |
| 卷号 | 10期号:10 |
| 关键词 | composite mould pattern quality imprinting pressure UV nanoimprint |
| DOI | 10.3390/mi10100706 |
| URL标识 | 查看原文 |
| 公开日期 | [db:dc_date_available] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4554235 |
| 专题 | 山东大学 |
| 作者单位 | Shandong Univ Sci & Technol, Inst NanoEngn, Coll Civil Engn & Architecture, Qingdao 266590, Shandong, Peoples R C |
| 推荐引用方式 GB/T 7714 | Zheng, Xu,Wang, Qing,Du, Wenquan. Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting[J]. MICROMACHINES,2019,10(10). |
| APA | Zheng, Xu,Wang, Qing,&Du, Wenquan.(2019).Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting.MICROMACHINES,10(10). |
| MLA | Zheng, Xu,et al."Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting".MICROMACHINES 10.10(2019). |
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