Reverse Nonequilibrium Molecular Dynamics Calculation of the Resist Shear Viscosity in UV-Nanoimprint Lithography | |
Du, Jun; Wei, Zhengying; Tang, Yiping | |
刊名 | JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE
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2013 | |
卷号 | 10期号:[db:dc_citation_issue]页码:208-212 |
关键词 | Shear Viscosity Nonequilibrium Molecular Dynamics Photo-Curable Resist |
ISSN号 | 1546-1955 |
DOI | [db:dc_identifier_doi] |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4436836 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Du, Jun,Wei, Zhengying,Tang, Yiping. Reverse Nonequilibrium Molecular Dynamics Calculation of the Resist Shear Viscosity in UV-Nanoimprint Lithography[J]. JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,2013,10([db:dc_citation_issue]):208-212. |
APA | Du, Jun,Wei, Zhengying,&Tang, Yiping.(2013).Reverse Nonequilibrium Molecular Dynamics Calculation of the Resist Shear Viscosity in UV-Nanoimprint Lithography.JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,10([db:dc_citation_issue]),208-212. |
MLA | Du, Jun,et al."Reverse Nonequilibrium Molecular Dynamics Calculation of the Resist Shear Viscosity in UV-Nanoimprint Lithography".JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE 10.[db:dc_citation_issue](2013):208-212. |
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