An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM
	Wei YJ(魏阳杰); Wu CD(吴成东); Dong ZL(董再励)
刊名	SCIENCE CHINA-TECHNOLOGICAL SCIENCES
	2011
卷号	54 期号:9 页码:2397-2403
关键词	atomic force microscope (AFM) compression effect information fusion surface elasticity
ISSN号	1674-7321
产权排序	1
中文摘要	Atomic force microscope (AFM), as an important instrument in micro/nano operation, has been widely used to measure sample's height information. However, the so called compression effect, due to force aroused from the contact of AFM tip with a sample surface, would result in imprecision of the surface's height measurement, i.e., the measured height is lower than expected. Up to now, there is not any effective and rapid method to attenuate this kind of measurement error. Thus, in this paper, an algorithm to obtain high accurate height measurement is proposed. Firstly, the concept of force curve is used to analyze the basic principle of the compression effect. Secondly, an automatic compensation method by fusing the height signal and the deflection signal is proposed. The proposed algorithm can also be used to obtain a surface elasticity image. Finally, in order to validate the proposed method, two experiments are conducted with respect to mutli-wall nano-carbon tubes on a silicon substrate and graphemes on a mica substrate.
WOS标题词	Science & Technology ; Technology
类目[WOS]	Engineering, Multidisciplinary ; Materials Science, Multidisciplinary
研究领域[WOS]	Engineering ; Materials Science
关键词[WOS]	ATOMIC-FORCE MICROSCOPY ; CARBON NANOTUBES
收录类别	SCI ; EI
资助信息	This work was supported by the CAS FEA International Partnership Program for Creative Research Teams.
语种	英语
WOS记录号	WOS:000293539400023
公开日期	2012-05-29
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/7305]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Wei YJ,Wu CD,Dong ZL. An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2011,54(9):2397-2403.
APA	Wei YJ,Wu CD,&Dong ZL.(2011).An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,54(9),2397-2403.
MLA	Wei YJ,et al."An automatic compensation method on compression effect and surface elasticity measurement based on the deflection signal of AFM".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 54.9(2011):2397-2403.