| Enhancing the adhesion strength of micro electroforming layer by ultrasonic agitation method and the application | |
| Zhao, Zhong; Du, Liqun; Tao, Yousheng; Li, Qingfeng; Luo, Lei | |
| 刊名 | ULTRASONICS SONOCHEMISTRY
 |
| 2016 | |
| 卷号 | 33页码:10-17 |
| 关键词 | MEMS Micro electroforming Ultrasonic power Ultrasonic frequency Adhesion strength Polarization |
| ISSN号 | 1350-4177 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4370470 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. 3.Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China. 4.Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zhao, Zhong,Du, Liqun,Tao, Yousheng,et al. Enhancing the adhesion strength of micro electroforming layer by ultrasonic agitation method and the application[J]. ULTRASONICS SONOCHEMISTRY,2016,33:10-17. |
| APA | Zhao, Zhong,Du, Liqun,Tao, Yousheng,Li, Qingfeng,&Luo, Lei.(2016).Enhancing the adhesion strength of micro electroforming layer by ultrasonic agitation method and the application.ULTRASONICS SONOCHEMISTRY,33,10-17. |
| MLA | Zhao, Zhong,et al."Enhancing the adhesion strength of micro electroforming layer by ultrasonic agitation method and the application".ULTRASONICS SONOCHEMISTRY 33(2016):10-17. |
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