Asymmetric Trajectory Planning for Vacuum Robot Motion

	Asymmetric Trajectory Planning for Vacuum Robot Motion
	Zou FS(邹风山); Qu DK(曲道奎); Wang JT(王金涛); Xu F(徐方)
	2011
会议名称	2011 IEEE International Conference on Robotics and Automation
会议日期	May 9-13, 2011
会议地点	Shanghai, China
关键词	vacuum robot asymmetric profile trajectory planning
页码	4 pp.
中文摘要	In order to obtain high-precision and high-speed motion and reduce the residual vibration for vacuum robot, an asymmetric trajectory planning method with jerk bounded is presented. In this paper we discuss all possible profile shapes for the asymmetric trajectory planning. And then the algorithm and its implementation are proposed with a direct and complete method. At the end, we apply the proposed approach to high-precision vacuum cluster tool robot which is used in the vacuum chambers for handling semiconductor wafer. Experimental results are presented to verify the effectiveness and reliability of the proposed approach.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议主办者	IEEE Robotics Autom. Soc.
会议录	2011 IEEE International Conference on Robotics and Automation
会议录出版者	IEEE
会议录出版地	Piscataway, NJ, USA
语种	英语
ISSN号	1050-4729
ISBN号	978-1-61284-386-5
WOS记录号	WOS:000324383405112
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/7661]
专题	沈阳自动化研究所_其他
推荐引用方式 GB/T 7714	Zou FS,Qu DK,Wang JT,et al. Asymmetric Trajectory Planning for Vacuum Robot Motion[C]. 见:2011 IEEE International Conference on Robotics and Automation. Shanghai, China. May 9-13, 2011.