| A review: Preparation, performance, and applications of silicon oxynitride film | |
| Shi, Yue; He, Liang; Guang, Fangcao; Li, Luhai; Xin, Zhiqing; Liu, Ruping | |
| 刊名 | Micromachines
 |
| 2019 | |
| 卷号 | 10期号:8 |
| DOI | 10.3390/mi10080552 |
| URL标识 | 查看原文 |
| 收录类别 | EI |
| 语种 | 英语 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4240390 |
| 专题 | 武汉大学 |
| 推荐引用方式 GB/T 7714 | Shi, Yue,He, Liang,Guang, Fangcao,et al. A review: Preparation, performance, and applications of silicon oxynitride film[J]. Micromachines,2019,10(8). |
| APA | Shi, Yue,He, Liang,Guang, Fangcao,Li, Luhai,Xin, Zhiqing,&Liu, Ruping.(2019).A review: Preparation, performance, and applications of silicon oxynitride film.Micromachines,10(8). |
| MLA | Shi, Yue,et al."A review: Preparation, performance, and applications of silicon oxynitride film".Micromachines 10.8(2019). |
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