The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2004-2010年

	The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray
	Zhu, WZ（朱伟忠） ; Wu, YQ（吴衍青） ; Guo, Z（郭智） ; Zhu, XL ; Ma, J ; Xie, CQ ; Shi, PX ; Zhou, HJ ; Huo, TL ; Tai, RZ（邰仁忠） ; Xu, HJ（徐洪杰）
刊名	ACTA PHYSICA SINICA
	2008
卷号	57 期号:10 页码:6386
ISSN号	1000-3290
通讯作者	Tai, RZ (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
英文摘要	Based on the rigorous coupled-wave analysis, the optimized design for a transmission two-gratings mask for 13.4 nm soft X-ray interference lithography has been accomplished. Then a large area transmission gratings was successfully fabricated by electron beam lithography (EBL), which has an area of 1.5 mm x 1.5 mm, ruling period of 100 nm, Cr relief thickness of 50 nm, gap/period of 0.6, and Si3N4 substrate thickness of 100 nm. Based on the quantitative estimation of the measurement data, the first and second order diffraction efficiencies were determined as 4.41% and 0.49%, respectively, in good agreement with the numerical simulation results. Through comparison between the measurement and the numerical simulation results, it was shown that the relief is entirely vertical and the gap/period was well controlled. This two-grating mask will be used installed on the soft X-ray interference lithography endstation at Shanghai Synchrotron Radiation Facility (SSRF). With its 1st and 2nd order diffraction, 50 ran period and 25 nm period gratings can be cost-effectively fabricated, respectively.
学科主题	Chemistry; Science & Technology - Other Topics; Materials Science
收录类别	SCI
语种	英语
WOS记录号	WOS:000260144300051
公开日期	2012-04-18
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/7857]
专题	上海应用物理研究所_中科院上海应用物理研究所2004-2010年
推荐引用方式 GB/T 7714	Zhu, WZ,Wu, YQ,Guo, Z,et al. The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray[J]. ACTA PHYSICA SINICA,2008,57(10):6386.
APA	Zhu, WZ.,Wu, YQ.,Guo, Z.,Zhu, XL.,Ma, J.,...&Xu, HJ.(2008).The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray.ACTA PHYSICA SINICA,57(10),6386.
MLA	Zhu, WZ,et al."The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray".ACTA PHYSICA SINICA 57.10(2008):6386.