Robust Array-Composite Micromachined Thermopile IR Detector by CMOS Technology

	Robust Array-Composite Micromachined Thermopile IR Detector by CMOS Technology
	Xu,DH ; Xiong,B ; Wang,YL ; Li,T
刊名	IEEE ELECTRON DEVICE LETTERS
	2011
卷号	32 期号:12 页码:1761-1763
关键词	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
ISSN号	0741-3106
学科主题	Engineering ; Electrical & Electronic
公开日期	2012-04-12
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/106933]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Xu,DH,Xiong,B,Wang,YL,et al. Robust Array-Composite Micromachined Thermopile IR Detector by CMOS Technology[J]. IEEE ELECTRON DEVICE LETTERS,2011,32(12):1761-1763.
APA	Xu,DH,Xiong,B,Wang,YL,&Li,T.(2011).Robust Array-Composite Micromachined Thermopile IR Detector by CMOS Technology.IEEE ELECTRON DEVICE LETTERS,32(12),1761-1763.
MLA	Xu,DH,et al."Robust Array-Composite Micromachined Thermopile IR Detector by CMOS Technology".IEEE ELECTRON DEVICE LETTERS 32.12(2011):1761-1763.