Optical and electrical properties of nitrogen incorporated amorphous carbon films

	Optical and electrical properties of nitrogen incorporated amorphous carbon films
	Yu, YH ; Chen, ZY ; Luo, EZ ; Cheung, WY ; Zhao, JP ; Wang, X ; Xu, JB ; Wong, SP ; Wilson, IH
刊名	JOURNAL OF APPLIED PHYSICS
	2000
卷号	87 期号:6 页码:2874-2879
关键词	CONDUCTION DEPOSITION HYDROGEN RATIO BORON ARC ION
ISSN号	0021-8979
通讯作者	Yu, YH, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
学科主题	Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95877]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Yu, YH,Chen, ZY,Luo, EZ,et al. Optical and electrical properties of nitrogen incorporated amorphous carbon films[J]. JOURNAL OF APPLIED PHYSICS,2000,87(6):2874-2879.
APA	Yu, YH.,Chen, ZY.,Luo, EZ.,Cheung, WY.,Zhao, JP.,...&Wilson, IH.(2000).Optical and electrical properties of nitrogen incorporated amorphous carbon films.JOURNAL OF APPLIED PHYSICS,87(6),2874-2879.
MLA	Yu, YH,et al."Optical and electrical properties of nitrogen incorporated amorphous carbon films".JOURNAL OF APPLIED PHYSICS 87.6(2000):2874-2879.