Optimized deposition of PLD-derived Ba0.8Sr0.2TiO3 thin film capacitor

	Optimized deposition of PLD-derived Ba0.8Sr0.2TiO3 thin film capacitor
	Xing, S ; Song, ZT ; Lin, CL
刊名	MATERIALS LETTERS
	2002
卷号	54 期号:5-6 页码:447-451
关键词	SRTIO3 FILMS
ISSN号	0167-577X
通讯作者	Xing, S, Acad Sinica, Shanghai Inst Met, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Materials Science, Multidisciplinary; Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95581]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Xing, S,Song, ZT,Lin, CL. Optimized deposition of PLD-derived Ba0.8Sr0.2TiO3 thin film capacitor[J]. MATERIALS LETTERS,2002,54(5-6):447-451.
APA	Xing, S,Song, ZT,&Lin, CL.(2002).Optimized deposition of PLD-derived Ba0.8Sr0.2TiO3 thin film capacitor.MATERIALS LETTERS,54(5-6),447-451.
MLA	Xing, S,et al."Optimized deposition of PLD-derived Ba0.8Sr0.2TiO3 thin film capacitor".MATERIALS LETTERS 54.5-6(2002):447-451.