Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency

	Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency
	Zhang, T ; Wang, Y ; Liu, WL ; Cheng, JG ; Song, ZT ; Feng, SL ; Chan-Wong, LWH ; Choy, CL
刊名	CHINESE PHYSICS LETTERS
	2005
卷号	22 期号:3 页码:694-696
关键词	DEVICES WAVE
ISSN号	0256-307X
通讯作者	Zhang, T, Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
学科主题	Physics, Multidisciplinary
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95298]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Zhang, T,Wang, Y,Liu, WL,et al. Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency[J]. CHINESE PHYSICS LETTERS,2005,22(3):694-696.
APA	Zhang, T.,Wang, Y.,Liu, WL.,Cheng, JG.,Song, ZT.,...&Choy, CL.(2005).Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency.CHINESE PHYSICS LETTERS,22(3),694-696.
MLA	Zhang, T,et al."Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency".CHINESE PHYSICS LETTERS 22.3(2005):694-696.