Grid emission suppression characteristics of molybdenum grids coated with Hf and Pt films

	Grid emission suppression characteristics of molybdenum grids coated with Hf and Pt films
	Jiang,J ; Jiang,BY ; Ren,CX ; Zhang,FM ; Feng,T ; Wang,X ; Liu,XH ; Zou,SC
刊名	VACUUM
	2006
卷号	80 期号:6 页码:537-541
关键词	OXIDATION BA
ISSN号	0042-207X
通讯作者	Jiang, J, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Res Ctr Semicond Funct Film Engn Technol, Shanghai 200050, Peoples R China
学科主题	Materials Science ; Multidisciplinary; Physics ; Applied
收录类别	SCI
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95245]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Jiang,J,Jiang,BY,Ren,CX,et al. Grid emission suppression characteristics of molybdenum grids coated with Hf and Pt films[J]. VACUUM,2006,80(6):537-541.
APA	Jiang,J.,Jiang,BY.,Ren,CX.,Zhang,FM.,Feng,T.,...&Zou,SC.(2006).Grid emission suppression characteristics of molybdenum grids coated with Hf and Pt films.VACUUM,80(6),537-541.
MLA	Jiang,J,et al."Grid emission suppression characteristics of molybdenum grids coated with Hf and Pt films".VACUUM 80.6(2006):537-541.