Structural characterization of beta-FeSi2 films on Si(100) prepared by reactive deposition solid phase epitaxy

	Structural characterization of beta-FeSi2 films on Si(100) prepared by reactive deposition solid phase epitaxy
	Ni, RS ; Wang, LW ; Shen, QW ; Lin, CG
刊名	JOURNAL OF TRACE AND MICROPROBE TECHNIQUES
	1997
卷号	15 期号:4 页码:541-545
ISSN号	0733-4680
通讯作者	Ni, RS, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
学科主题	Chemistry, Analytical
收录类别	SCI
原文出处	http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=64&SID=T1bBjPaMHA4PI3h27lN&page=1&doc=1
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98851]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Ni, RS,Wang, LW,Shen, QW,et al. Structural characterization of beta-FeSi2 films on Si(100) prepared by reactive deposition solid phase epitaxy[J]. JOURNAL OF TRACE AND MICROPROBE TECHNIQUES,1997,15(4):541-545.
APA	Ni, RS,Wang, LW,Shen, QW,&Lin, CG.(1997).Structural characterization of beta-FeSi2 films on Si(100) prepared by reactive deposition solid phase epitaxy.JOURNAL OF TRACE AND MICROPROBE TECHNIQUES,15(4),541-545.
MLA	Ni, RS,et al."Structural characterization of beta-FeSi2 films on Si(100) prepared by reactive deposition solid phase epitaxy".JOURNAL OF TRACE AND MICROPROBE TECHNIQUES 15.4(1997):541-545.