Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition

	Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition
	Zhao, JP ; Wang, X ; Chen, ZY ; Yang, SQ ; Shi, TS ; Liu, XH
刊名	MATERIALS LETTERS
	1997
卷号	33 期号:1-2 页码:41-45
ISSN号	0167-577X
通讯作者	Zhao, JP, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,865 CHANGNING RD,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Materials Science, Multidisciplinary; Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98845]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Zhao, JP,Wang, X,Chen, ZY,et al. Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition[J]. MATERIALS LETTERS,1997,33(1-2):41-45.
APA	Zhao, JP,Wang, X,Chen, ZY,Yang, SQ,Shi, TS,&Liu, XH.(1997).Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition.MATERIALS LETTERS,33(1-2),41-45.
MLA	Zhao, JP,et al."Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition".MATERIALS LETTERS 33.1-2(1997):41-45.