Study on the growth of biaxially aligned yttria-stabilized zirconia films during ion beam assisted deposition

	Study on the growth of biaxially aligned yttria-stabilized zirconia films during ion beam assisted deposition
	Mao,YJ ; Ren,CX ; Yuan,J ; Zhang,F ; Liu,XH ; Zou,SC
刊名	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
	1997
卷号	15 期号:5 页码:2687-2692
关键词	BUFFER LAYERS ALIGNMENT
ISSN号	0734-2101
学科主题	Materials Science ; Coatings & Films; Physics ; Applied
收录类别	SCI
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98785]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Mao,YJ,Ren,CX,Yuan,J,et al. Study on the growth of biaxially aligned yttria-stabilized zirconia films during ion beam assisted deposition[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,1997,15(5):2687-2692.
APA	Mao,YJ,Ren,CX,Yuan,J,Zhang,F,Liu,XH,&Zou,SC.(1997).Study on the growth of biaxially aligned yttria-stabilized zirconia films during ion beam assisted deposition.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,15(5),2687-2692.
MLA	Mao,YJ,et al."Study on the growth of biaxially aligned yttria-stabilized zirconia films during ion beam assisted deposition".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 15.5(1997):2687-2692.