SHRINKAGE EFFECTS OF POLYIMIDE FILM UNDER ION-BEAM IRRADIATION

CORC > 上海微系统与信息技术研究所 > 功能材料与器件 > 期刊论文（1999年以前)

	SHRINKAGE EFFECTS OF POLYIMIDE FILM UNDER ION-BEAM IRRADIATION
	XU, XL ; YU, YH ; LIN, ZX ; CHEN, LZ ; FANG, F ; ZHOU, ZY ; Zou, SC(邹世昌） ; DU, GD ; XIA, GQ
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	1991
卷号	59 页码:1267-1270
ISSN号	0168-583X
通讯作者	XU, XL, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear
收录类别	SCI
原文出处	http://www.sciencedirect.com/science/article/pii/0168583X9195808Q
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98337]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	XU, XL,YU, YH,LIN, ZX,et al. SHRINKAGE EFFECTS OF POLYIMIDE FILM UNDER ION-BEAM IRRADIATION[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1991,59:1267-1270.
APA	XU, XL.,YU, YH.,LIN, ZX.,CHEN, LZ.,FANG, F.,...&XIA, GQ.(1991).SHRINKAGE EFFECTS OF POLYIMIDE FILM UNDER ION-BEAM IRRADIATION.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,59,1267-1270.
MLA	XU, XL,et al."SHRINKAGE EFFECTS OF POLYIMIDE FILM UNDER ION-BEAM IRRADIATION".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 59(1991):1267-1270.