Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator

	Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator
	Yang,ZF ; Fang,N ; Wu,AM ; Chen,J ; Zhang,M ; Wang,X ; Zou,SC
刊名	OPTICAL ENGINEERING
	2009
卷号	48 期号:3 页码:30503-30503
关键词	WAVE-GUIDE TECHNOLOGY
ISSN号	0091-3286
通讯作者	Yang, ZF, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/94821]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Yang,ZF,Fang,N,Wu,AM,et al. Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator[J]. OPTICAL ENGINEERING,2009,48(3):30503-30503.
APA	Yang,ZF.,Fang,N.,Wu,AM.,Chen,J.,Zhang,M.,...&Zou,SC.(2009).Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator.OPTICAL ENGINEERING,48(3),30503-30503.
MLA	Yang,ZF,et al."Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator".OPTICAL ENGINEERING 48.3(2009):30503-30503.