Design and fabrication of a novel optically readable thermal imaging system based on MEMS technology

	Design and fabrication of a novel optically readable thermal imaging system based on MEMS technology
	Feng, F ; Jiao, JW ; Xiong, B ; Wang, YL
刊名	JOURNAL OF INFRARED AND MILLIMETER WAVES
	2004
卷号	23 期号:2 页码:125-130
关键词	SENSORS
ISSN号	1001-9014
通讯作者	Feng, F, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
语种	中文
公开日期	2011-12-20
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/41764]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Feng, F,Jiao, JW,Xiong, B,et al. Design and fabrication of a novel optically readable thermal imaging system based on MEMS technology[J]. JOURNAL OF INFRARED AND MILLIMETER WAVES,2004,23(2):125-130.
APA	Feng, F,Jiao, JW,Xiong, B,&Wang, YL.(2004).Design and fabrication of a novel optically readable thermal imaging system based on MEMS technology.JOURNAL OF INFRARED AND MILLIMETER WAVES,23(2),125-130.
MLA	Feng, F,et al."Design and fabrication of a novel optically readable thermal imaging system based on MEMS technology".JOURNAL OF INFRARED AND MILLIMETER WAVES 23.2(2004):125-130.