High Quality Porous Anodic Alumina Membrane Growing on Micron Thickness Aluminum Film Sputtered on Silicon Substrate | |
Wu, Junjun; Li, Dan; Wang, Kaige; Zhang, Chen; Hu, Xiaoyun; Jin, Aizi; Gu, Changzhi; Zhang, Liangliang | |
2013 | |
关键词 | Magnetron Sputtering Nanopore Silicon-based Porous Anodic Alumina Adhesivity |
卷号 | 662 |
期号 | [db:dc_citation_issue] |
DOI | [db:dc_identifier_doi] |
页码 | 16-+ |
会议录 | NANOTECHNOLOGY AND PRECISION ENGINEERING, PTS 1 AND 2 |
URL标识 | 查看原文 |
ISSN号 | 1022-6680 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/3305362 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Wu, Junjun,Li, Dan,Wang, Kaige,et al. High Quality Porous Anodic Alumina Membrane Growing on Micron Thickness Aluminum Film Sputtered on Silicon Substrate[C]. 见:. |
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