Low temperature SDB and interface behaviours

	Low temperature SDB and interface behaviours
	JIAO,JW ; LU,D ; XIONG,B ; WANG,WY
刊名	MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995
	1995
页码	394-397
学科主题	Automation & Control Systems; Engineering, Mechanical
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38772]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	JIAO,JW,LU,D,XIONG,B,et al. Low temperature SDB and interface behaviours[J]. MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995,1995:394-397.
APA	JIAO,JW,LU,D,XIONG,B,&WANG,WY.(1995).Low temperature SDB and interface behaviours.MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995,394-397.
MLA	JIAO,JW,et al."Low temperature SDB and interface behaviours".MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995 (1995):394-397.