| Usage of Janus green B for the improvement of the filling effect during replication process of nanoimprint nickel stamp | |
| Zhang, Ran; Zheng, Yongguang; Liu, Ze; Chu, Jinkui | |
| 刊名 | MICRO & NANO LETTERS
 |
| 2018 | |
| 卷号 | 13页码:24-26 |
| 关键词 | nickel nanolithography filling electrodeposition electroforming seals (stoppers) Janus green B filling effect replication process nanoimprint nickel stamp void elimination JGB molecules high aspect ratio nanotrenches nanoelectroforming process electron density metal deposition rate sealing phenomenon electrodeposition process depth 200 nm size 80 nm Ni |
| ISSN号 | 1750-0443 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3273492 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zhang, Ran,Zheng, Yongguang,Liu, Ze,et al. Usage of Janus green B for the improvement of the filling effect during replication process of nanoimprint nickel stamp[J]. MICRO & NANO LETTERS,2018,13:24-26. |
| APA | Zhang, Ran,Zheng, Yongguang,Liu, Ze,&Chu, Jinkui.(2018).Usage of Janus green B for the improvement of the filling effect during replication process of nanoimprint nickel stamp.MICRO & NANO LETTERS,13,24-26. |
| MLA | Zhang, Ran,et al."Usage of Janus green B for the improvement of the filling effect during replication process of nanoimprint nickel stamp".MICRO & NANO LETTERS 13(2018):24-26. |
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