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Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography
Wei, Zhengying; Du, Jun; Geng, Qi; Li, Shize; Tang, Yiping
刊名JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE
2015
卷号12期号:[db:dc_citation_issue]页码:77-81
关键词Coarse-Grained Molecular Dynamics Nanoimprint Lithography Deformation Behavior Degree of Polymerization
ISSN号1546-1955
DOI[db:dc_identifier_doi]
URL标识查看原文
WOS记录号[DB:DC_IDENTIFIER_WOSID]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/3234056
专题西安交通大学
推荐引用方式
GB/T 7714
Wei, Zhengying,Du, Jun,Geng, Qi,et al. Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography[J]. JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,2015,12([db:dc_citation_issue]):77-81.
APA Wei, Zhengying,Du, Jun,Geng, Qi,Li, Shize,&Tang, Yiping.(2015).Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography.JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,12([db:dc_citation_issue]),77-81.
MLA Wei, Zhengying,et al."Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography".JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE 12.[db:dc_citation_issue](2015):77-81.
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