Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography | |
Wei, Zhengying; Du, Jun; Geng, Qi; Li, Shize; Tang, Yiping | |
刊名 | JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE |
2015 | |
卷号 | 12期号:[db:dc_citation_issue]页码:77-81 |
关键词 | Coarse-Grained Molecular Dynamics Nanoimprint Lithography Deformation Behavior Degree of Polymerization |
ISSN号 | 1546-1955 |
DOI | [db:dc_identifier_doi] |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/3234056 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Wei, Zhengying,Du, Jun,Geng, Qi,et al. Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography[J]. JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,2015,12([db:dc_citation_issue]):77-81. |
APA | Wei, Zhengying,Du, Jun,Geng, Qi,Li, Shize,&Tang, Yiping.(2015).Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography.JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,12([db:dc_citation_issue]),77-81. |
MLA | Wei, Zhengying,et al."Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography".JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE 12.[db:dc_citation_issue](2015):77-81. |
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