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	Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology
	Xu, Wei; Song, Kui; Ma, Shenhui; Gao, Bo; Chiu, Yi; Lee, Yi-Kuen
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2016
卷号	25期号:[db:dc_citation_issue]页码:954-962
关键词	Micro calorimetric flow sensor CMOS microelectromechanical systems (MEMS) 1-D sensor model Reynolds number Prandtl number Thermoresistive
ISSN号	1057-7157
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3221004
专题	西安交通大学
推荐引用方式 GB/T 7714	Xu, Wei,Song, Kui,Ma, Shenhui,et al. Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2016,25([db:dc_citation_issue]):954-962.
APA	Xu, Wei,Song, Kui,Ma, Shenhui,Gao, Bo,Chiu, Yi,&Lee, Yi-Kuen.(2016).Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,25([db:dc_citation_issue]),954-962.
MLA	Xu, Wei,et al."Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 25.[db:dc_citation_issue](2016):954-962.

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