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Improving the thickness uniformity of micro electroforming layer by megasonic agitation and the application
Zhao, Ming; Du, Liqun; Xu, Zheng; Zhang, Xi; Cao, Qiang; Ji, Xuechao; Wei, Zhuangzhuang; Liu, Junshan
刊名Materials Chemistry and Physics
2020
卷号239
ISSN号02540584
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/3063074
专题大连理工大学
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GB/T 7714
Zhao, Ming,Du, Liqun,Xu, Zheng,et al. Improving the thickness uniformity of micro electroforming layer by megasonic agitation and the application[J]. Materials Chemistry and Physics,2020,239.
APA Zhao, Ming.,Du, Liqun.,Xu, Zheng.,Zhang, Xi.,Cao, Qiang.,...&Liu, Junshan.(2020).Improving the thickness uniformity of micro electroforming layer by megasonic agitation and the application.Materials Chemistry and Physics,239.
MLA Zhao, Ming,et al."Improving the thickness uniformity of micro electroforming layer by megasonic agitation and the application".Materials Chemistry and Physics 239(2020).
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