| Fast optical proximity correction method based on nonlinear compressive sensing | |
| Xu Ma; Javier Garcia-Frias; Lisong Dong; Gonzalor.Arce; YanQiu Li; Zhiqiang Wang | |
| 刊名 | Optics Express
 |
| 2018-05-28 | |
| 文献子类 | 期刊论文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://159.226.55.107/handle/172511/19070]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 推荐引用方式 GB/T 7714 | Xu Ma,Javier Garcia-Frias,Lisong Dong,et al. Fast optical proximity correction method based on nonlinear compressive sensing[J]. Optics Express,2018. |
| APA | Xu Ma,Javier Garcia-Frias,Lisong Dong,Gonzalor.Arce,YanQiu Li,&Zhiqiang Wang.(2018).Fast optical proximity correction method based on nonlinear compressive sensing.Optics Express. |
| MLA | Xu Ma,et al."Fast optical proximity correction method based on nonlinear compressive sensing".Optics Express (2018). |
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