Fabricating metal structures with taper angles and smooth sidewalls | |
Li JF(李俊峰); Wang WB(王玮冰); Li JJ(李俊杰); Zhao C(赵超); He XB(贺晓彬); Yu JH(余嘉晗); Zhou N(周娜); Jiang QF(姜齐风); Fu JY(傅剑宇) | |
刊名 | Journal of Micromechanics and Microengineering |
2017-11-07 | |
文献子类 | 期刊论文 |
语种 | 英语 |
内容类型 | 期刊论文 |
源URL | [http://159.226.55.106/handle/172511/17986] |
专题 | 微电子研究所_集成电路先导工艺研发中心 |
作者单位 | 中国科学院微电子研究所 |
推荐引用方式 GB/T 7714 | Li JF,Wang WB,Li JJ,et al. Fabricating metal structures with taper angles and smooth sidewalls[J]. Journal of Micromechanics and Microengineering,2017. |
APA | Li JF.,Wang WB.,Li JJ.,Zhao C.,He XB.,...&Fu JY.(2017).Fabricating metal structures with taper angles and smooth sidewalls.Journal of Micromechanics and Microengineering. |
MLA | Li JF,et al."Fabricating metal structures with taper angles and smooth sidewalls".Journal of Micromechanics and Microengineering (2017). |
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