一种GaN基功率电子器件及其制备方法
王鑫华; 刘新宇; 黄森; 赵超; 王文武; 包琦龙; 魏珂
2018-08-28
著作权人中国科学院微电子研究所
专利号US10062775
国家美国
文献子类发明专利
英文摘要

A GaN-based power electronic device and a method for manufacturing the same is provided. The GaN-based power electronic device comprising a substrate and an epitaxial layer over the substrate. The epitaxial layer comprises a GaN-based heterostructure layer, a superlattice structure layer and a P-type cap layer. The superlattice structure layer is provided over the heterostructure layer, and the P-type cap layer is provided over the superlattice structure layer. By using this electronic device, gate voltage swing and safe gate voltage range of the GaN-based power electronic device manufactured on the basis of the P-type cap layer technique may be further extended, and dynamic characteristics of the device may be improved. Therefore, application process for the GaN-based power electronic device that is based on the P-type cap layer technique will be promoted.

公开日期2017-10-26
申请日期2016-12-02
语种中文
内容类型专利
源URL[http://159.226.55.107/handle/172511/18881]  
专题微电子研究所_高频高压器件与集成研发中心
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
王鑫华,刘新宇,黄森,等. 一种GaN基功率电子器件及其制备方法. US10062775. 2018-08-28.
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