一种制备原位掺杂Pt的NiO有序纳米线阵列的方法
李冬梅; 陈鑫; 梁圣法; 牛洁斌; 张培文; 刘宇; 李小静; 詹爽; 张浩; 罗庆
2016-08-16
著作权人中国科学院微电子研究所
专利号US9418843
国家美国
文献子类发明专利
英文摘要

The present disclosure provides a method for manufacturing ordered nanowires array of NiO doped with Pt in situ, comprising: growing a Ni layer on a high-temperature resistant and insulated substrate; applying a photoresist on the Ni layer, pattering a pattern region of the ordered nanowires array by applying electron beam etching on the photoresist, growing Ni on the pattern region of the ordered nanowires array, peeling off the photoresist by acetone and etching the surface of the Ni layer by ion beam etching so as to etch off the Ni layer grown on the surface of the substrate and to leave the Ni on the pattern region of the ordered nanowires array to form the ordered Ni nanowires array; dipping the ordered Ni nanowires array into a solution of H.sub.2PtCl.sub.6 so as to displace Pt on the Ni nanowires array by a displacement reaction; and oxidizing the Ni nanowires array attached with Pt in an oxidation oven to obtain the ordered nanowires array of NiO doped with Pt. The present invention is simple and practical and the sensitivity and reliability of the doped sensor on the gas of CO and H.sub.2 are greatly improved.

公开日期2014-07-24
申请日期2013-01-17
语种中文
内容类型专利
源URL[http://159.226.55.106/handle/172511/16575]  
专题微电子研究所_微电子器件与集成技术重点实验室
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
李冬梅,陈鑫,梁圣法,等. 一种制备原位掺杂Pt的NiO有序纳米线阵列的方法. US9418843. 2016-08-16.
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