Dose dependence of nano-hardness of 6H-SiC crystal under irradiation with inert gas ions

doi:10.1016/j.nimb.2018.02.035

	Dose dependence of nano-hardness of 6H-SiC crystal under irradiation with inert gas ions
	Song, Yin2 ; Yang, Yitao2 ; Zhang, Chonghong2 ; Su, Changhao 1,2; Ding, Zhaonan 2
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	2018-05-01
卷号	422 页码:50-53
关键词	6H-SiC Inert gas ions irradiation Nanoindentation Irradiation hardening
ISSN号	0168-583X
DOI	10.1016/j.nimb.2018.02.035
英文摘要	Single crystal 6H-SiC was irradiated by inert gas ions (He, Ne, Kr and Xe ions) to various damage levels at room temperature. Nano-indentation test was performed to investigate the hardness change behavior with damage. The depth profile of nano-hardness for 6H-SiC decreased with increasing depth for both the pristine and irradiated samples, which was known as indentation size effect (ISE). Nix-Gao model was proposed to determine an asymptotic value of nano-hardness by taking account of ISE for both the pristine and irradiated samples. In this study, nano-hardness of the irradiated samples showed a strong dependence on damage level and showed a weak dependence on ions species. From the dependence of hardness on damage, it was found that the change of hardness demonstrated three distinguishable stages with damage: (I) The hardness increased with damage from 0 to 0.2 dpa and achieved a maximum of hardening fraction similar to 20% at 0.2 dpa. The increase of hardness in this damage range was contributed to defects produced by ion irradiation, which can be described well by Taylor relation. (II) The hardness reduced rapidly with large decrement in the damage range from 0.2 to 0.5 dpa, which was considered to be from the covalent bond breaking. (III) The hardness reduced with small decrement in the damage range from 0.5 to 2.2 dpa, which was induced by extension of the amorphous layer around damage peak.
资助项目	National Natural Science Foundation of China (NSFC)[11475230] ; National Natural Science Foundation of China (NSFC)[91426304]
WOS关键词	SILICON-CARBIDE ; MECHANICAL-PROPERTIES ; NEUTRON-IRRADIATION ; HELIUM ; INDENTATION ; AMORPHIZATION ; IMPLANTATION ; CHALLENGES ; EVOLUTION ; NANOHARDNESS
WOS研究方向	Instruments & Instrumentation ; Nuclear Science & Technology ; Physics
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000430766100009
资助机构	National Natural Science Foundation of China (NSFC)
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/47650]
专题	近代物理研究所_能源材料研究组近代物理研究所_材料研究中心
作者单位	1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Gansu, Peoples R China
推荐引用方式 GB/T 7714	Song, Yin,Yang, Yitao,Zhang, Chonghong,et al. Dose dependence of nano-hardness of 6H-SiC crystal under irradiation with inert gas ions[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2018,422:50-53.
APA	Song, Yin,Yang, Yitao,Zhang, Chonghong,Su, Changhao,&Ding, Zhaonan.(2018).Dose dependence of nano-hardness of 6H-SiC crystal under irradiation with inert gas ions.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,422,50-53.
MLA	Song, Yin,et al."Dose dependence of nano-hardness of 6H-SiC crystal under irradiation with inert gas ions".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 422(2018):50-53.