Surface erosion of GaN bombarded by highly charged (208)Pb(q+)-Ions

	Surface erosion of GaN bombarded by highly charged (208)Pb(q+)-Ions
	Yang Yi-Tao; Zhang Li-Qing; Zhang Chong-Hong; Yao Cun-Feng; Li Bing-Sheng; Jin Yun-Fan; Sun You-Mei; Song Shu-Jian
刊名	CHINESE PHYSICS LETTERS
	2008-07-01
卷号	25 页码:2670-2673
ISSN号	0256-307X
英文摘要	Surface change of gallium nitride specimens after bombardment by highly charged Pb(q+)-ions (q = 25, 35) at room temperature is studied by means of atomic force microscopy. The experimental results reveal that the surface of GaN specimens is significantly etched and erased. An unambiguous step-up is observed. The erosion depth not only strongly depends on the charge state of ions, but also is related to the incident angle of Pbq+-ions and the ion dose. The erosion depth of the specimens in 60 incidence (tilted incidence) is significantly deeper than that of the normal incidence. The erosion behaviour of specimens has little dependence on the kinetic energy of ion (E(k) = 360, 700 keV). On the other hand, surface roughness of the irradiated area is obviously decreased due to erosion compared with the un-irradiated area. A fiat terrace is formed.
WOS关键词	IMPLANTED GAN ; DAMAGE
WOS研究方向	Physics
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000257326000093
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/29726]
专题	近代物理研究所_材料研究中心
通讯作者	Zhang Li-Qing
作者单位	Lanzhou Univ, Inst Modern Phys, Lanzhou 730000, Peoples R China
推荐引用方式 GB/T 7714	Yang Yi-Tao,Zhang Li-Qing,Zhang Chong-Hong,et al. Surface erosion of GaN bombarded by highly charged (208)Pb(q+)-Ions[J]. CHINESE PHYSICS LETTERS,2008,25:2670-2673.
APA	Yang Yi-Tao.,Zhang Li-Qing.,Zhang Chong-Hong.,Yao Cun-Feng.,Li Bing-Sheng.,...&Song Shu-Jian.(2008).Surface erosion of GaN bombarded by highly charged (208)Pb(q+)-Ions.CHINESE PHYSICS LETTERS,25,2670-2673.
MLA	Yang Yi-Tao,et al."Surface erosion of GaN bombarded by highly charged (208)Pb(q+)-Ions".CHINESE PHYSICS LETTERS 25(2008):2670-2673.