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	The effects of pre-irradiation on the formation of Si1-x Cx alloys
	Wang, Yin-Shu; Li, Jin-Min; Wang, Yan-Bin; Wang, Yu-Tian; Sun, Guo-Sheng; Lin, Lan-Ying
刊名	Wuli Xuebao/Acta Physica Sinica
	2001
卷号	50页码:1332-1333
ISSN号	1000-3290
英文摘要	Carbon ions were implanted into crystal Si to a concentration of(0.6-1.5)at% at room temperature. Some samples were pre-irradiated with 29Si+ ions, while others were not pre-irradiated. Then the two kinds of samples were implanted with 12C+ ions simultaneously, and Si1-x Cx alloys were grown by solid phase epitaxy with high-temperature annealing. The effects of pre-irradiation on the formation of Si1-x Cx alloys were studied. If the dose of implanted C ion was less than that for amorphizing Si crystals, the implanted C atoms would like to combine with defects produced during implantation, and then it was difficult for Si1-x Cx alloys to form after annealing at 950°C. Pre-irradiation was advantageous for Si1-x Cx alloy formation. With the increase of C ion dose, the damage produced by C ions increased. Pre-irradiation was unfavorable for Si1-x Cx alloy formation. If the im planted C concentration was higher than that for solid phase epitaxy solution, only part of the implanted C atoms form Si1-x Cx alloys and the effects of pre-irradiation could be neglected. As the annealing temperature was increased to 1050°C, Si1-x Cx alloys in both pre-irradiated and unpreirradiated samples of low C concentration remained, whereas most part of Si1-x Cx alloys in samples with high C concentration vanished.
出版者	Science Press
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/64336]
专题	中国科学院近代物理研究所
作者单位	1.Department of Physics, Beijing Normal University, Beijing 100875, China 2.Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China 3.Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China
推荐引用方式 GB/T 7714	Wang, Yin-Shu,Li, Jin-Min,Wang, Yan-Bin,et al. The effects of pre-irradiation on the formation of Si1-x Cx alloys[J]. Wuli Xuebao/Acta Physica Sinica,2001,50:1332-1333.
APA	Wang, Yin-Shu,Li, Jin-Min,Wang, Yan-Bin,Wang, Yu-Tian,Sun, Guo-Sheng,&Lin, Lan-Ying.(2001).The effects of pre-irradiation on the formation of Si1-x Cx alloys.Wuli Xuebao/Acta Physica Sinica,50,1332-1333.
MLA	Wang, Yin-Shu,et al."The effects of pre-irradiation on the formation of Si1-x Cx alloys".Wuli Xuebao/Acta Physica Sinica 50(2001):1332-1333.

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