| In-situ shape measurement technology during large aperture optical planar continuous polishing process | |
| Xie, Ruiqing; Liao, Defeng; Chen, Jian; Zhao, Shijie; Chen, Xianhua; Ji, Baojian; Wang, Jian; Xu, Qiao | |
| 2018 | |
| 关键词 | In-situ measurement Large-aperture mirrors Optical components Pitch lap Polishing processs Polishing technology Quantitative information Surface figure |
| 卷号 | 10710 |
| 会议录 | Proceedings of SPIE - The International Society for Optical Engineering
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| URL标识 | 查看原文 |
| ISSN号 | 0277-786X |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2830569 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Xie, Ruiqing,Liao, Defeng,Chen, Jian,et al. In-situ shape measurement technology during large aperture optical planar continuous polishing process[C]. 见:. |
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