Fabrication of extremely thermal-stable GaN template on Mo substrate using double bonding and step annealing process

doi:10.1088/1674-4926/37/8/083001

CORC > 北京大学 > 工学院

	Fabrication of extremely thermal-stable GaN template on Mo substrate using double bonding and step annealing process
	Wang Qing ; Liu Yang ; Sun Yongjian ; Tong Yuzhen ; Zhang Guoyi
刊名	半导体学报（英文版）
	2016
关键词	gallium nitride Mo substrate medium bonding laser lift off thermal stability homogeneous epitaxial gallium nitride Mo substrate medium bonding laser lift off thermal stability homogeneous epitaxial
DOI	10.1088/1674-4926/37/8/083001
英文摘要	A new layer transfer technique which comprised double bonding and a step annealing process was utilized to transfer the GaN epilayer from a sapphire substrate to a Mo substrate. Combined with the application of the thermal-stable bonding medium, the resulting two-inch-diameter GaN template showed extremely good stability under high temperature and low stress state. Moreover, no cracks and winkles were observed. The transferred GaN template was suitable for homogeneous epitaxial, thus could be used for the direct fabrication of vertical LED chips as well as power electron devices. It has been confirmed that the double bonding and step annealing technique together with the thermal-stable bonding layer could significantly improve the bonding strength and stress relief, finally enhancing the thermal stability of the transferred GaN template.; Project supported by the Guangdong Innovative Research Team Program,the China Postdoctoral Science Foundation,the National Natural Science Foundation of Guangdong, China,the Opened Fund of the State Key Laboratory on Integrated Optoelectronics; 中国科技核心期刊(ISTIC); 中国科学引文数据库(CSCD); 8; 15-18; 37
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/478602]
专题	工学院
推荐引用方式 GB/T 7714	Wang Qing,Liu Yang,Sun Yongjian,et al. Fabrication of extremely thermal-stable GaN template on Mo substrate using double bonding and step annealing process[J]. 半导体学报（英文版）,2016.
APA	Wang Qing,Liu Yang,Sun Yongjian,Tong Yuzhen,&Zhang Guoyi.(2016).Fabrication of extremely thermal-stable GaN template on Mo substrate using double bonding and step annealing process.半导体学报（英文版）.
MLA	Wang Qing,et al."Fabrication of extremely thermal-stable GaN template on Mo substrate using double bonding and step annealing process".半导体学报（英文版） (2016).