Operational Limitation and Instability of a Microwave-Induced   Microplasma Enclosed in a Microcavity at Low Gas Pressures

doi:10.1109/TPS.2016.2599523

CORC > 北京大学 > 软件与微电子学院

	Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures
	Tang, Jiali ; Yu, Xinhai ; Wang, Zhenyu ; Tu, Shan-Tung ; Wang, Zhengdong
刊名	IEEE TRANSACTIONS ON PLASMA SCIENCE
	2016
关键词	Enclosed extinguishing glow-to-arc transition (GAT) microwave-induced microplasma stability SPLIT-RING RESONATOR EMISSION-SPECTROMETRY MASS-SPECTROMETER PLASMA STERILIZATION DISCHARGES
DOI	10.1109/TPS.2016.2599523
英文摘要	In this paper, operational limitations (the extinguishing of the stable glow discharge) and instabilities [glow-to-arc transition (GAT)] of microwave-induced microplasmas enclosed in microcavities operated at low gas pressures were investigated by experiments, in comparison with unenclosed microplasmas. For enclosed microplasmas, when gas pressure decreased, GAT occasionally occurred, whereas GAT was never detected for unenclosed microplasmas, because the gas temperatures of enclosed microplasmas were higher than those of unenclosed ones. For enclosed microplasmas operated at low gas pressures, an increase in the microcavity dimension is a valid method to avoid GAT. Extinguishing pressure of stable glow-discharge microplasma (pext) for microwave-induced microplasma enclosed in a microcavity microplasma was lower than that for microwave-induced microplasma generator without the PDMS cavity (UEC) microplasmas. The increase in input power decreased pext for UEC microplasmas but showed a slight influence on pext for EC microplasmas. This paper shed some light on understanding of the enclosed microplasmas operated at low gas pressures.; SCI(E); EI; ARTICLE; yxhh@ecust.edu.cn; 10; 2314-2322; 44
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/494393]
专题	软件与微电子学院
推荐引用方式 GB/T 7714	Tang, Jiali,Yu, Xinhai,Wang, Zhenyu,et al. Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2016.
APA	Tang, Jiali,Yu, Xinhai,Wang, Zhenyu,Tu, Shan-Tung,&Wang, Zhengdong.(2016).Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures.IEEE TRANSACTIONS ON PLASMA SCIENCE.
MLA	Tang, Jiali,et al."Operational Limitation and Instability of a Microwave-Induced Microplasma Enclosed in a Microcavity at Low Gas Pressures".IEEE TRANSACTIONS ON PLASMA SCIENCE (2016).