Characteristics of atomic layer deposited transparent aluminum-doped   zinc oxide thin films at low temperature

doi:10.1007/s12598-015-0460-2

CORC > 北京大学 > 信息科学技术学院

	Characteristics of atomic layer deposited transparent aluminum-doped zinc oxide thin films at low temperature
	Zhao, Fei-Long ; Dong, Jun-Chen ; Zhao, Nan-Nan ; Wu, Jing ; Han, De-Dong ; Kang, Jin-Feng ; Wang, Yi
刊名	RARE METALS
	2016
关键词	Atomic layer deposition Aluminum-doped ZnO thin film Transparent Uniformity TRANSISTORS SEMICONDUCTORS
DOI	10.1007/s12598-015-0460-2
英文摘要	Various aluminum-doped zinc oxide (AZO) films were prepared on Si substrate by atomic layer deposition (ALD) at 100 degrees C. The effect of the composition of AZO films on their electrical, optical characteristics, structural property and surface topography was investigated. The appearance of electrical resistivity shows their semiconducting properties. In most of the visible light band, all the AZO films present transparency of more than 80 %. Al doping suppresses the AZO film crystallization. When the Al doping concentration increases up to 3.95 at%, the AZO film has some small multicrystal grains with random orientation. Al doping improves the roughness of i-ZnO film. The root mean square (RMS) roughness of samples prepared by ALD is much smaller than that prepared by radio-frequency magnetron sputtering reported.; financially supported by the National Basic Research Program of China,the National Natural Science Foundation of China; SCI(E); EI; 中国科技核心期刊(ISTIC); 中国科学引文数据库(CSCD); ARTICLE; wangyi@ime.pku.edu.cn; 7; 509-512; 35
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/492093]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhao, Fei-Long,Dong, Jun-Chen,Zhao, Nan-Nan,et al. Characteristics of atomic layer deposited transparent aluminum-doped zinc oxide thin films at low temperature[J]. RARE METALS,2016.
APA	Zhao, Fei-Long.,Dong, Jun-Chen.,Zhao, Nan-Nan.,Wu, Jing.,Han, De-Dong.,...&Wang, Yi.(2016).Characteristics of atomic layer deposited transparent aluminum-doped zinc oxide thin films at low temperature.RARE METALS.
MLA	Zhao, Fei-Long,et al."Characteristics of atomic layer deposited transparent aluminum-doped zinc oxide thin films at low temperature".RARE METALS (2016).