Controlled fabrication of nanoscale wrinkle structure by fluorocarbon plasma for highly transparent triboelectric nanogenerator

CORC > 北京大学 > 信息科学技术学院

	Controlled fabrication of nanoscale wrinkle structure by fluorocarbon plasma for highly transparent triboelectric nanogenerator
	Cheng Xiaoliang ; Miao Liming ; Su Zongming ; Chen Haotian ; Song Yu ; Chen Xuexian ; Zhang Haixia
刊名	Microsystems & Nanoengineering
	2017
关键词	fluorocarbon plasma nanostructure fabrication triboelectric nanogenerator wrinkle structure
英文摘要	In this paper, we report a novel nanoscale wrinkle-structure fabrication process using fluorocarbon plasma on poly (dimethylsiloxane) (PDMS) and Solaris membranes. Wrinkles with wavelengths of hundreds of nanometers were obtained on these two materials, showing that the fabrication process was universally applicable. By varying the plasma-treating time, the wavelength of the wrinkle structure could be controlled. Highly transparent membranes with wrinkle patterns were obtained when the plasmatreating time was < 125 s. The transmittances of these membranes were >90% in the visible region, making it difficult to distinguish them from a flat membrane. The deposited fluorocarbon polymer also dramatically reduced the surface energy, which allowed us to replicate the wrinkle pattern with high precision onto other membranes without any surfactant coating. The combined advantages of high electron affinity and high transparency enabled the fabricated membrane to improve the performance of a triboelectric nanogenerator. This nanoscale, single-step, and universal wrinkle-pattern fabrication process, with the functionality of high transparency and ultra-low surface energy, shows an attractive potential for future applications in micro-and nanodevices, especially in transparent energy harvesters.; supported by the National Natural Science Foundation of China,National Key R&D Project from Ministry of Science and Technology, China,the Beijing Science & Technology Project,the Beijing Natural Science Foundation of China; 中国科学引文数据库(CSCD); 1/2; 16074-1-16074-9; 3
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/476741]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Cheng Xiaoliang,Miao Liming,Su Zongming,et al. Controlled fabrication of nanoscale wrinkle structure by fluorocarbon plasma for highly transparent triboelectric nanogenerator[J]. Microsystems & Nanoengineering,2017.
APA	Cheng Xiaoliang.,Miao Liming.,Su Zongming.,Chen Haotian.,Song Yu.,...&Zhang Haixia.(2017).Controlled fabrication of nanoscale wrinkle structure by fluorocarbon plasma for highly transparent triboelectric nanogenerator.Microsystems & Nanoengineering.
MLA	Cheng Xiaoliang,et al."Controlled fabrication of nanoscale wrinkle structure by fluorocarbon plasma for highly transparent triboelectric nanogenerator".Microsystems & Nanoengineering (2017).