Electric field and induced charges distribution model for MEMS   strip-type sensing electrodes

doi:10.1007/s00542-015-2745-7

CORC > 北京大学 > 信息科学技术学院

	Electric field and induced charges distribution model for MEMS strip-type sensing electrodes
	Fang, Yigeng ; Peng, Chunrong ; Yang, Pengfei ; Fang, Dongming ; Xia, Shanhong
刊名	MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
	2017
关键词	DESIGN ACTUATORS GYROSCOPE MICROACTUATOR FABRICATION CAPACITANCE SIMULATION
DOI	10.1007/s00542-015-2745-7
英文摘要	Strip-type sensing electrodes are often used in MEMS sensors and actuators, such as micro gyroscope, accelerometers, electrometers and electric field sensors. To achieve good performance and optimize the parameters of the electrostatically driven sensors, it is important to simulate and calculate the electric force/field of the driven/sensing electrodes. This paper for the first time presents the theoretical derivation model of the electric field distribution and induced charges for the strip-type sensing electrodes. Based on Schwarz-Christoffel transformation method, the exact solution of electric field and charges distributions are calculated. The matching comparison results between the calculation and the simulation indicate good validity of the proposed model. Furthermore, experimental results show that the response of the sensor is in good accordance with the theoretical calculation within the range from 0 to 50 kV/m.; National Natural Science Foundation of China [61201078, 61327810]; SCI(E); ARTICLE; 1; 143-150; 23
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/476423]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Yigeng,Peng, Chunrong,Yang, Pengfei,et al. Electric field and induced charges distribution model for MEMS strip-type sensing electrodes[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017.
APA	Fang, Yigeng,Peng, Chunrong,Yang, Pengfei,Fang, Dongming,&Xia, Shanhong.(2017).Electric field and induced charges distribution model for MEMS strip-type sensing electrodes.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS.
MLA	Fang, Yigeng,et al."Electric field and induced charges distribution model for MEMS strip-type sensing electrodes".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2017).