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	RELIABLE DEPOSITION OF ULTRA-THIN PARYLENE
	Wang, Wei ; Kang, Dongyang ; Dai, Wangzhi ; Tai, Yu-Chong
	2016
英文摘要	This paper reports a novel and reliable process to prepare ultra-thin parylene film based on a principle combining both molecular effusion and diffusion. For the first time, a technique for the deposition of parylene film thinner than 20 run in a highly controllable and repeatable way is developed. Parylene films with various thicknesses could also be prepared in a single deposition run by using this method. This technique holds promising potentials in extensive applications, such as protection/dielectric layer for needle electrodes and flexible electronics, semi-permeable membrane, and other polymer engineering.; CPCI-S(ISTP); yctai@mems.caltech.edu; 462-464
语种	英语
出处	29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/457037]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Wei,Kang, Dongyang,Dai, Wangzhi,et al. RELIABLE DEPOSITION OF ULTRA-THIN PARYLENE. 2016-01-01.

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