140 GHz空腔滤波器设计及加工工艺研究

doi:10.3969/j.issn.1005-9490.2016.01.005

CORC > 北京大学 > 信息科学技术学院

	140 GHz空腔滤波器设计及加工工艺研究; The Design of Cavity Filter at 140 GHz and Study on Processing Technology
	Ning B(甯彪) ; Mou M(缪旻)
刊名	电子器件
	2016
关键词	滤波器空腔毫米波太赫兹全波仿真电火花微加工 filter cavity millimeter wave THz HFSS electric spark micro-machining
DOI	10.3969/j.issn.1005-9490.2016.01.005
英文摘要	设计并实现了一种采用进口电火花技术加工的D波段电感膜片耦合的矩形波导空腔滤波器。采用等效电路法设计了一个140 GHz矩形空腔带通滤波器。采用有限元仿真软件HFSS分析了腔体个数对滤波器主要性能的影响，最终成功设计了一个性能优良的四阶空腔滤波器，中心频率（140±3）GHz，带内插入损耗S21在-3 dB以内，回波损耗S11在-20 dB以下。采用电火花微加工技术成功加工出了四阶滤波器的主体部分，相应完成了结构键合等关键工艺，首次制作了基于电火花技术的D波段矩形波导空腔滤波器。测试结果为中心频率（138.5±3）GHz，带内插入损耗最好达到了-4.4 dB。结果表明滤波器在140 GHz具有带通特性和滤波功能，尽管与理论上的-3 dB有差异，但考虑到加工误差、夹具损耗等情况下，样品主要技术指标与设计值较为一致。; A rectangular waveguide cavity filter of D band was designed and achieved with inductor diaphragm cou?pling by adopting electric spark micro-machining technology. Using the equivalent circuit method a rectangular cav?ity filter at 140 GHz was designed. The influence of the cavity number on the main performance of the filter was an?alyzed. A four order cavity filter with excellent performance was designed successfully. The center frequency is (140±3)GHz,the insertion loss is within-3 dB,the return loss is below-20 dB. The prototypes were fabricated us?ing electric spark micro-machining technology,the bonding technique was employed for the fabrication of filter. The electric spark micro-machining cavity filter with a center frequency of(138.5±3)GHz,insertion loss of-4.4 dB, the test results showed the filter has the band-pass characteristics and filter function in 140 GHz. In the case of con?sidering the machining error and fixture loss,the main technique indexes basically accord with the design values.; 国家自然科学基金项目(61176102，60976083，60501007)；国家重大科技专项基金项目(2009ZX02038)；北京市属高等学校人才强教计划项目(PHR201108257)；北京市属高等学校高层次人才引进与培养计划项目; 中文核心期刊要目总览(PKU); 中国科技核心期刊(ISTIC); 1; 21-25
语种	中文
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/441467]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	甯彪,缪旻. 140 GHz空腔滤波器设计及加工工艺研究, The Design of Cavity Filter at 140 GHz and Study on Processing Technology[J]. 电子器件,2016.
APA	甯彪,&缪旻.(2016).140 GHz空腔滤波器设计及加工工艺研究.电子器件.
MLA	甯彪,et al."140 GHz空腔滤波器设计及加工工艺研究".电子器件 (2016).