Fabrication and thermal stability characterisation of Ru electrode used   for high power contact radio frequency microelectromechanical system   switch

doi:10.1049/mnl.2013.0300

CORC > 北京大学 > 信息科学技术学院

	Fabrication and thermal stability characterisation of Ru electrode used for high power contact radio frequency microelectromechanical system switch
	Zhang, Hongze ; Wang, Wei ; Li, Zhihong
刊名	micro nano letters
	2013
DOI	10.1049/mnl.2013.0300
英文摘要	Reported are the fabrication and thermal stability of an Ru electrode, which is used for a high power Ru-Au contact radio frequency microelectromechanical system switch with a microspring contact design. In this reported work, a new process with bilayer lift-off and a strain release layer is developed, thereby acquiring the 3000 angstrom Ti/Au/Ru electrode with excellent smooth edges for high-power handling capacity and low loss. Furthermore, thermal tests under 400, 500 and 600 degrees C for over 1 h have been performed. Investigation of the surface with scanning electron microscopy and energy dispersive X-ray spectroscopy shows that the electrode has a good thermal stability at 400 degrees C, which is proper for high-power handling. The cold switch DC current handling capacity is advanced from <90 mA per point (failed) to 100 mA per point (still working).; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; SCI(E); EI; 0; ARTICLE; 10; 587-590; 8
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/390914]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Hongze,Wang, Wei,Li, Zhihong. Fabrication and thermal stability characterisation of Ru electrode used for high power contact radio frequency microelectromechanical system switch[J]. micro nano letters,2013.
APA	Zhang, Hongze,Wang, Wei,&Li, Zhihong.(2013).Fabrication and thermal stability characterisation of Ru electrode used for high power contact radio frequency microelectromechanical system switch.micro nano letters.
MLA	Zhang, Hongze,et al."Fabrication and thermal stability characterisation of Ru electrode used for high power contact radio frequency microelectromechanical system switch".micro nano letters (2013).