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	A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor
	Zheng, Baixiang ; Tang, Wei ; Che, Zhe ; Zhang, Haixia
	2010
英文摘要	This paper presents a CMOS capacitive sensing amplifier for a SiC MEMS capacitive pressure sensor. Noise performance and noise optimization studied from a theoretical point of view. This amplifier is a differential difference amplifier (DDA) with optimal transistor sizing to minimize sensor noise floor. The simulation result shows that the circuit can obtain a stable and linear voltage, and Continuous-Time Voltage is an ideal choice compared to other method for sensing ultra-small capacitance change of the MEMS sensors. ?2010 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NEMS.2010.5592264
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/329788]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zheng, Baixiang,Tang, Wei,Che, Zhe,et al. A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor. 2010-01-01.

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