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	A novel electrostatically driven micromirror with lateral comb actuators and T-shaped torsion bars
	Wang, Cong-Shun ; Xiong, Chun-Yang ; Yang, Zhen-Chuan ; Zhang, Da-Cheng ; Fang, Jing
	2004
英文摘要	There are many applications of micromirror such as laser communication, projection displays, optical scanner, optical switch, and so on. In this paper, a novel electrostatically driven micromirror with lateral comb actuators and T-shaped torsion bars is proposed for the first time. It can be seen that the actuating force arm is larger and the actuating torsion moment is larger by using T-shaped torsion bars. It is also easily seen that actuating voltage is lower than ever. At the same time, T-shaped bar can create higher in- and out-of-plane bending stiffness. Therefore, the micromirror is mechanically more stable and is prevented from pull-in to a great extent. The micromirror is fabricated by standard bulk silicon process with the novel isolation technology. The primary test results show that the micromirror can rotate around the torsional bars and its side instability should be considered deeply for the flexibility of the bar connecting the comb actuators with the micromirror. ? 2004 IEEE.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/329233]
专题	信息科学技术学院 工学院
推荐引用方式 GB/T 7714	Wang, Cong-Shun,Xiong, Chun-Yang,Yang, Zhen-Chuan,et al. A novel electrostatically driven micromirror with lateral comb actuators and T-shaped torsion bars. 2004-01-01.

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