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	An improved design method of the MEMS-based folded-beam micromirror
	Li, Yan Mei ; Chen, Qing Hua ; Chen, Ying Jun ; Wu, Wen Gang
	2014
英文摘要	In this paper, the folded-beam torsion MEMS mirror that meets a set of specified constraints was developed. An optimization algorithm that we newly adopted in the RCS(restricted competition selection) GA(genetic algorithm) could overcome some difficulties in single-search algorithms. Moreover, by the proposed method, the designer's experience, and view and judgment could be reflected effectively. ? (2014) Trans Tech Publications, Switzerland.; EI; 0
语种	英语
DOI标识	10.4028/www.scientific.net/AMM.529.135
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/327323]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li, Yan Mei,Chen, Qing Hua,Chen, Ying Jun,et al. An improved design method of the MEMS-based folded-beam micromirror. 2014-01-01.

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