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	High performance MEMS spiral inductors
	Fang, Dong-Ming ; Yuan, Quan ; Li, Xiu-Han ; Zhang, Hai-Xia ; Zhou, Yong ; Zhao, Xiao-Lin
	2010
英文摘要	In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabrication process is simple, using surface micromachined technology with three masks. Two types of spiral inductor were fabricated and the measured results showed that the spiral inductors had high performance at high frequency. The maximum quality of the spiral inductor- Type A is 15.8 at 1.4GHz with inductance of 4.61nH. The maximum quality of the spiral inductor-Type B is 19.7 at 4.1 GHz with inductance of 1.40nH. ?2010 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/NEMS.2010.5592582
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295504]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Fang, Dong-Ming,Yuan, Quan,Li, Xiu-Han,et al. High performance MEMS spiral inductors. 2010-01-01.

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