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	A dual-function leak detector for MEMS devices
	Jin, Y.F. ; Wang, Z.P. ; Wang, Z.F. ; Shi, X.Q. ; Lim, P.C. ; Miao, M. ; Shan, X.C.
	2003
英文摘要	In this paper, the development of a dual-function leak detector is presented. The system consists of a laser interference instrument, a portable helium leakage detector, a specially designed test chamber with a quartz-glass observation window, a pressure gauge. The developed measuring system offers new features for experimental investigation on the integrity of hermetic sealed structure. Both helium bombing mode and diaphragm deflection mode were investigated using the developed detector. Basically, the system can be used for helium leak bombing detection. By employing this system for leakage detection in a micro optical switch, it was shown that a leakage of less than 10-7 std cc/sec can be measured. The system can also be used to measure the surface deflection of a diaphragm. The measurement was accomplished by using laser interference technique to monitor the pressure variation within the small cavity of MEMS devices after pressurized gas was introduced. A leakage as low as 10-14 std cc/sec could be detected for a sample with several cubic millimeter cavity of 10-4 mbar.; EI; 0
语种	英语
DOI标识	10.1117/12.472715
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295377]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Jin, Y.F.,Wang, Z.P.,Wang, Z.F.,et al. A dual-function leak detector for MEMS devices. 2003-01-01.

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