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	Modeling of nano-resonator testing system by lumped parameter method
	Han, Xiang ; Wu, Wengang ; Fan, Jie ; Yan, Guizhen ; Hao, Yilong
	2007
英文摘要	An electromechanical model for nano-beam resonator is proposed, considering simultaneously the residual stress, the nonlinear stretching effect and the fringing field effect. With some reasonable simplification, the analytical expression is derived from Euler equation. Based on the parameters extracted from the model, lumped parameter method is introduced to analyze the dynamic characterization of the whole testing system. The phase and amplitude of the output are detected from simulations and more precise resonance prediction is available. Based on the model and testing system, the influence of the parasitic effect is discussed. ? 2006 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/ICSICT.2006.306197
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295130]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Han, Xiang,Wu, Wengang,Fan, Jie,et al. Modeling of nano-resonator testing system by lumped parameter method. 2007-01-01.

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