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	A novel MEMS electromagnetic energy harvester with series coils
	Li, Zhong Liang ; Di Han, Meng ; Zhang, Hai Xia
	2013
英文摘要	A novel MEMS electromagnetic energy harvester with series coils was designed, fabricated and tested. The magnetic properties of permanent magnets were analyzed by MAXWELL and we enhanced magnetization through magnet arrays. An integrated method to fabricate permanent magnet was applied for fabrication, this MEMS compatible fabrication processes not only increased the production efficiency but also condensed the device's volume to 2.72 mm3. The new structure with series coils improved the output voltage to 0.98 mV at resonant frequency 48 Hz and the power density can be 5.52 uW/cm3. ? 2013 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/Transducers.2013.6627251
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294414]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li, Zhong Liang,Di Han, Meng,Zhang, Hai Xia. A novel MEMS electromagnetic energy harvester with series coils. 2013-01-01.

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